Session Index

Thin-Film Technology & Coating Design

Thin-Film Technology & Coating Design III
Friday, Dec. 3, 2021  10:45-12:00
Presider: 陳錫釗(NYUST) 廖博輝(TIRI)
Room: 303e
10:45 - 11:00
Manuscript ID.  0208
Paper No.  2021-FRI-S1003-O001
Ping-Tai Jiang Sputtering Ga-doped ZnO thin film to apply on touch sensor
Ping-Tai Jiang;Yen-Sheng Lin

In this study, the various thickness of Ga-doped ZnO (GZO) film had been deposited on PC substrate, the microstructures and loading test were analyzed to obtain the optimal sensing film for future application in touch sensors.

11:00 - 11:15
Manuscript ID.  0159
Paper No.  2021-FRI-S1003-O002
Po-Hsiang Chao NO Gas Sensor Based on ZnO Doped Ga integrated with Pt Micro Heater and Channel Length Effect on Sensing Characteristics
Po-Hsiang Chao;Ray-Hua Horng

Most gas sensors like catalytic gas sensors and semiconductor gas sensors need a heater to provide appropriate temperature for gas sensing. Metal oxide semiconductors have been used in gas sensing widely. Since most electronic gas sensors must operate at a working point of 300oC or above, integrating a micro heater into the sensor is a subject that has to be studied. ZnO doped Ga based thin film apply to gas sensors and how to design and optimize the integration of the micro heater into the gas sensor is investigated in this study.

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11:15 - 11:30
Manuscript ID.  0620
Paper No.  2021-FRI-S1003-O003
Zhi-Guang Chen Epitaxial Growth of Gallium Nitride Films on Sapphire Substrate by the Pulsed Magnetron Sputtering Deposition
Zhi-Guang Chen;Chong-Wen Zheng;Sheng-Hui Chen

In this paper, the pulsed magnetron sputtering was applied with low temperature and low cost to deposit gallium nitride films on sapphire substrate for large area fabrication. Finally, a single crystal GaN film has been deposited by stacking 2D/3D structure with good surface roughness.

11:30 - 11:45
Manuscript ID.  0512
Paper No.  2021-FRI-S1003-O004
Chuang Hsuan Chueh Investigation of Interdigital Electrode on Indium Tin-Oxide (ITO) Thin Films by Thermal Evaporation Coater
Chuang Hsuan Chueh;Chieh Hsun Chen;Shih Chang Shei;Nan Ming Lin

Indium tin oxide is an n-type wide-bandgap semiconductor with good transmittance and resistivity. In our experiment, we set 3 pieces of ITO at same condition such as voltage, procedure. Moreover, we will discuss the difference of temperature raise for 3 kinds of electrodes. We will measure each transmittance by UV and resistance by Four Point Probe Sheet Resistance Meter before our experiment.

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11:45 - 12:00
Manuscript ID.  0500
Paper No.  2021-FRI-S1003-O005
Pei Rong Lin The Effects Of Gas Flow Growth Inorganic Cesium Lead Bromide Perovskites Film By Chemical Vapor Deposition
Pei Rong Lin

In this article, we report the effect of gas flow on growth inorganic perovskites film by low pressure chemical vapor deposition system (LPCVD). The thickness of the film increased with gas flow. The film quality was also affected by gas flow, which influence the optical and electric properties.

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