Session Index

Thin-Film Technology & Coating Design

Poster Session I
Friday, Dec. 3, 2021  14:00-16:00
Presider: 徐進成(FJU) 郭倩丞(NCU)
Room: Corridor
Award Candidate (Paper Competition)
Manuscript ID.  0592
Paper No.  2021-FRI-P1001-P001
Po-An Lin Nickel-Induced Laterally Crystallization Polysilicon Thin Film Transistor for In-Display Photo-sensing Application
Po-An Lin;Tsung-Che Chiang;Zhen-Hao Li;Po-Tsun Liu

Polycrystalline-silicon thin-film transistors (poly-Si TFTs) were successfully manufactured with low metal contamination Ni-induced lateral crystallization (LC-NILC) and p-type poly-Si channel. The relative low power consumption and thermal budget with capability of integrating in pixels, going to meet the requirement of idea of system on panel (SoP).

Award Candidate (Paper Competition)
Manuscript ID.  0083
Paper No.  2021-FRI-P1001-P002
Sheng-Jie Su Enhancement of Resistive Switching Characteristics of InWZnO-based CBRAM with Low Power Consumption
Sheng-Jie Su;Chih-Chieh Hsu;Shu-Wei Chang;Po-Tsun Liu

In this study, the electrical characteristics of InWZnO based conductive bridge random access memory (CBRAM) with single and bilayer structure under low compliance current (10-5 A) are systematically investigated. However, the endurance test of bilayer IWZO CBRAM device are extracted by cycling I-V curve. The bilayer CBRAM device with insertion layer of TiOx has the best performance for endurance test. Finally, the retention property of bilayer CBRAM device can be maintained the high resistance state and low resistance over 104 s, which paved the potential way for low power applications.

Award Candidate (Applied Optoelectronics Competition)
Manuscript ID.  0104
Paper No.  2021-FRI-P1001-P003
Ri-Jun Li Investigation of optical and electrochromic properties of complementary V2O5/WO3 all-solid-state electrochromic devices deposited with magnetron sputtering
Ri-Jun Li;Hsi-Chao Chen;Yu-Hung Yen;Bo-Jun Guo;Guan-Yu Chen;Tsung-tse Wu;Chu-Han Huang

Vanadium pentoxide (V2O5) is used as auxiliary color change layer for a complementary ITO/WO3/(LiClO4+PC)+PMMA/V2O5/ITO all-solid-state electrochromic devices. The deposited parameters of V2O5 film include the argon flow is 20 sccm, oxygen flow change from 2 to 8 sccm. However, the transmittance variation (△T) can reach 48.8% @ 500nm.


Manuscript ID.  0144
Paper No.  2021-FRI-P1001-P004
Chih-Jui Chang Copper oxide heterojunction photocathodes for photoelectrochemical water splitting
Chih-Jui Chang;Chih-Wei Lai;Wei-Cheng Jiang;Chang-Sik Choi;Hsin-Chieh Yu;YongMan Choi

Copper oxide heterojunction photocathodes for photoelectrochemical water splitting were fabricated using the sol-gel thin-film deposition and electrodeposition methods. Bilayered CuO/Cu2O photocathodes exhibit a higher photoactivity than CuO and Cu2O due to excellent electron-hole separation and a faster charge transportation rate.

Award Candidate (Paper Competition)
Manuscript ID.  0380
Paper No.  2021-FRI-P1001-P005
You-Syuan Zhou Tin Oxide Semiconductor for High Performance P-Type Thin Film Transistor Application
You-Syuan Zhou;Tsung-Che Chiang;Zhen-Hao Li;Po-Tsun Liu

In this work, we process the reactive sputtering deposition for SnO film fabrication, and adjust different ratio of O2/Ar in sputtering process and annealing temperature. 5%-SnO
18 -3 5 2 film reaches carrier concentration of 8.51 x10 cm , and sheet resistance of 1.07 x10 Ω/cm ,


Manuscript ID.  0195
Paper No.  2021-FRI-P1001-P006
Chih-Wei Lai Enhanced photoelectrochemical water splitting using nano-structured CuO-based heterojunction electrodes
Chih-Wei Lai;Yi-Syuan Li;Chih-Jui Chang;Chang-Sik Choi;YongMan Choi

Nano-structured CuO-based heterojunction photoelectrodes for photoelectrochemical water splitting were fabricated by using the sol-gel thin-film deposition method. Graphitic carbon nitride (g-C3N4) quantum dots and high-entropy ABO3-type perovskite nanoparticles were successfully synthesized for fabricating heterojunction photoelectrodes on CuO.

Award Candidate (Paper Competition) Award Candidate (Applied Optoelectronics Competition)
Manuscript ID.  0197
Paper No.  2021-FRI-P1001-P007
Yun-Sheng Li Effects of UV-ozone treatment on Deep-Ultraviolet Photodetectors based on ZnGa2O4 thin film
Yun-Sheng Li;Ray-Hua Horng;Fu-Gow Tarntair

In this study, metal-semiconductor-metal(MSM) deep ultraviolet photodetectors (DUVPDS) based on ZnGa2O4 (ZGO) is fabricated, ZGO thin film is prepared by metal organic chemical vapor deposition (MOCVD).The effect of UV-ozone treatment on the characteristic of DUVPDS is reported. It shows better performance than the device without UV-ozone treatment.

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Manuscript ID.  0515
Paper No.  2021-FRI-P1001-P008
Johan Iskandar Post-treatment methods to improve the performance of near-infrared perovskite light-emitting diodes
Johan Iskandar;Ade Kurniawan;Xiang-Ren Teng;Cheng-Kai Hsu;Jeng-Huang Ou;Shun-Wei Liu;Hsin-Ming Cheng;Chih-Chien Lee

A feasible and effective post-treatment method is presented to improve the quality of MAPbI3 films by using bulky alkylammonium cations (Phenethylammonium iodide (PEAI) and N-butylammonium iodide (BAI)). To the perovskite LEDs, it enhances the electroluminescence properties, and decreases the turn-on voltage. Ultimately, the electroluminescence intensity of 3.07 uW is achieved with BAI post-treatment. It represents a 38% compared to the best control cell. Moreover, the whole post-treatment process is simple and cheap, which only requires of 1 mg/mL PEAI or BAI solution in isopropanol. It is beneficial to control the reaction rate by changing the volume of the solution.

Award Candidate (Paper Competition) Award Candidate (Applied Optoelectronics Competition)
Manuscript ID.  0527
Paper No.  2021-FRI-P1001-P009
Yi Chen Design of shadow mask for large-area anti-reflective coating by plasma-assisted reactive magnetron sputtering
Yi Chen;Yung-Che Lee;Chien-Jen Tang

The antireflection coating was prepared by the plasma-assisted reactive magnetron sputtering system and the shadow-mask designed by the simulation program. The specification of the reflectance in 420 nm to 680 nm was less than 1%, and the highest reflectance did not exceed 1.5%. Verify that a large-area uniform film could be obtained through the shadow-mask designed by the simulation program.


Manuscript ID.  0164
Paper No.  2021-FRI-P1001-P010
Tseng Shih-cheng Optimizing Zinc Oxide transparent conductive electrode to apply on light-emitting diode
Tseng Shih-cheng;Lin Yen-Sheng

In this study, the intermittent process is used to enhance the optoelectronic properties of ultra thin Zinc Oxide (ZnO) film, which will be used as transparent conductive electrode to apply on light-emitting diode.


Manuscript ID.  0518
Paper No.  2021-FRI-P1001-P011
Ade Kurniawan Improving Efficiency in MAPbI3 based near-infrared Perovskite LED by a LiQ Interlayer
Ade Kurniawan;Johan Iskandar;Xiang-Ren Teng;Cheng-Kai Hsu;Jeng-Huang Ou;Shun-Wei Liu;Hsin-Ming Cheng;Chih-Chien Lee

In this work, we investigate the performance of methylammonium lead iodide (MAPbI3) based perovskite LEDs with LiQ as Interlayer. We found that inserting an ultrathin Lithium-Quinolate (LiQ) interlayer between the EML and ETL shows enhancement performance of external quantum efficiency (EQE) Compared to the control device without LiQ. LiQ could restrains severe photoluminescence (PL) quenching at the perovskite/ETL interface and effectively block excess electrons. A high optical output power of 856.83 μW and external quantum efficiency of 4.8 % are achieved, which represents a 2.7 times enhancement in the quantum efficiency compared to device without LiQ interlayer.


Manuscript ID.  0417
Paper No.  2021-FRI-P1001-P012
Chi Wei Ho Study of Electrical Properties on ZTO TFTs With Different Oxygen Flow
Chi Wei Ho;Fan Ku;Shiu-Min Ma;Shih-Chang Shei

This study is about finding appropriate environment for making ZTO TFTs. We deposited and analyzed the ZTO membrane at first through transmittance, Hall Effect, Micro-PL Spectrometer and XRD. Afterwards, we deposited HFO2 as insulating layer and ZTO as channel layer in different oxygen flow by RF sputtering system. At the top of TFT, we deposited 70nm Al as gate layer. Finally, concluded that when Ar:O2 is 45:5 was the better condition for manufacturing.

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Manuscript ID.  0140
Paper No.  2021-FRI-P1001-P013
Yu-Wei Lin Investigation of optical and supercapacitance properties of doped copper oxide thin films
Yu-Wei Lin;Tai-Hsin Yin;Chih-Wei Lai;Bu-Jine Liu;Chang-Sik Choi;YongMan Choi

The sol-gel thin-film approach using spin coating was applied to prepare high-performance CuO-based supercapacitor materials. Four different doped CuO thin films with a metal cation (Ni, Co, Fe, or La) were effectively fabricated, boosting the supercapacitor performance compared to CuO.


Manuscript ID.  0105
Paper No.  2021-FRI-P1001-P014
Kun-Hong Chen Investigation of optical and biaxial stress properties of multi-layers deposited on flexible PET with ion-assisted E-gun deposition
Kun-Hong Chen;Hsi-Chao Chen;Chun-Hao Chang;Chou-Kai Kuo;Chi-Yang Lai

The ZrO2/SiO2 and TiO2/SiO2 multi-layers deposited on PET substrate with ion-assisted E-gun deposition. The optical and residual stress were investigated by spectra and shadow moiré interferometer. However, the residual stress could reduce to -297.3MPa and -132.6MPa.


Manuscript ID.  0354
Paper No.  2021-FRI-P1001-P015
Ming Yuan Chen Optical Phase Array Based on LiNbO3 Optical Waveguide for Three-Dimensional Scanning
Ming Yuan Chen;Chia Ming Liu;Chun Nien Liu;Charles Tu;Wood Hi Cheng

The external electric field can be used to change the refractive index of LiNbO3, thereby forming an optical phased array structure for three-dimensional scanning. With the change of refractive index, the strong light coupled out of the LiNbO3 waveguide has a deflection angle of 2 degrees.


Manuscript ID.  0082
Paper No.  2021-FRI-P1001-P016
Yi-Zhe Zhang Sputtering ZnO thin film to apply on CO gas sensor
Yi-Zhe Zhang;Yen-Sheng Lin

In this study, the different sputtering powers is used to deposit ZnO thin, which will be applied on CO gas sensor. The absorption rate and gas sensing sensitivity are measured, the optimal thin film is deposited on 200W power.


Manuscript ID.  0673
Paper No.  2021-FRI-P1001-P017
Ching-Wei Chen Silver coating verification for space telescope mirrors
Ching-Wei Chen;Liang-Tang Chen;Chia-Ray Chen;Ching-Hsiang Kou;Zong-Ru Yu;Min-Wei Hung

Development and verification of a high quality silver coating on remote sensing telescope mirrors is demonstrated in this study. The optical coating has been implemented optical spectrum measurement and cross-cut adhesion test. The environmental test, including high temperature & humidity, thermal cycling, and radiation tests are also performed to verify the validation of this component. According to this qualification model (QM) development experience, the manufacturing of a space-qualified flight model (FM) mirror coating is expected for the future missions.

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